| Flash (Kbytes) | EEPROM (Kbytes) | SRAM (Bytes) | Max I/O Pins | F.max (MHz) | Vcc (V) | 16-bit Timers | 8-bit Timer | PWM (channels) | RTC | SPI | UART | TWI | ISP | 10-bit A/D (Channels) | Analog Comparator | Brown Out Detector | Watchdog | On Chip Oscillator | Hardware Multiplier | Interrupts | Ext Interrupts | Self Program Memory | Packages | Green Packages | ||
| AT90CAN128 Automotive | 128 | 4 | 4096 | 53 | 16 | 2.7-5.5 | 2 | 2 | 8 | Yes | Yes | 2 | -- | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 34 | 8 | Yes | MLF 64 | MLF 64 LQFP 64 | |
| AT90CAN32 Automotive | 32 | 1 | 2048 | 53 | 16 | 2.7-5.5 | 2 | 2 | 8 | Yes | Yes | 2 | -- | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 34 | 8 | Yes | MLF 64 | MLF 64 LQFP 64 | |
| AT90CAN64 Automotive | 64 | 2 | 4096 | 53 | 16 | 2.7-5.5 | 2 | 2 | 8 | Yes | Yes | 2 | -- | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 34 | 8 | Yes | MLF 64 | MLF 64 LQFP 64 | |
| AT90PWM1 | 8 | 0.5 | 512 | 19 | 16 | 2.7-5.5 | 1 | 1 | 7 | Yes | 1 | No | -- | Yes | 11 | Yes | Yes | Yes | Yes | Yes | 26 | 4 | Yes | rrow SOIC 24 rrow SOIC 24 | ||
| AT90PWM2 | 8 | 0.5 | 512 | 19 | 16 | 2.7-5.5 | 1 | 1 | 7 | Yes | 1 | Yes | -- | Yes | 11 | Yes | Yes | Yes | Yes | Yes | 29 | 4 | Yes | rrow SOIC 24 rrow SOIC 24 | ||
| AT90PWM216 | 16 | 0.5 | 1024 | 19 | 16 | 2.7-5.5 | 1 | 1 | 10 | Yes | 1 | Yes | -- | Yes | 11 | Yes | Yes | Yes | Yes | Yes | 29 | 4 | Yes | rrow SOIC 24 | rrow SOIC 24 | |
| AT90PWM3 | 8 | 0.5 | 512 | 27 | 16 | 2.7-5.5 | 1 | 1 | 10 | Yes | 1 | Yes | -- | Yes | 11 | Yes | Yes | Yes | Yes | Yes | 29 | 4 | Yes | MLF 32 | MLF 32 rrow SOIC 32 | |
| AT90PWM316 | 16 | 0.5 | 1024 | 27 | 16 | 2.7-5.5 | 1 | 1 | 10 | Yes | 1 | Yes | -- | Yes | 11 | Yes | Yes | Yes | Yes | Yes | 29 | 4 | Yes | MLF 32 | MLF 32 rrow SOIC 32 | |
| ATmega128 | 128 | 4 | 4096 | 53 | 16 | 2.7-5.5 | 2 | 2 | 8 | Yes | 1 | 2 | Yes | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 34 | 8 | Yes | TQFP 64 | TQFP 64 MLF 64 | |
| ATmega1280 | 128 | 4 | 8192 | 86 | 16 | 1.8-5.5 | 4 | 2 | 16 | Yes | 1+USART | 4 | Yes | Yes | 16 | Yes | Yes | Yes | Yes | Yes | 57 | 32 | Yes | CBGA 100 TQFP 100 CBGA 100 | ||
| ATmega1281 | 128 | 4 | 8192 | 54 | 16 | 1.8-5.5 | 4 | 2 | 9 | Yes | 1+USART | 2 | Yes | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 48 | 17 | Yes | TQFP 64 MLF 64 TQFP 64 | ||
| ATmega128RZAV | 128 | 4 | 8192 | 54 | 16 | 1.8-5.5 | 4 | 2 | 9 | Yes | 1+USART | 2 | Yes | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 48 | 17 | Yes | TQFP 64 | TQFP 64 MLF 64 | |
| ATmega128RZBV | 128 | 4 | 8192 | 86 | 16 | 1.8-5.5 | 4 | 2 | 16 | Yes | 1+USART | 4 | Yes | Yes | 16 | Yes | Yes | Yes | Yes | Yes | 57 | 32 | Yes | TQFP 100 | TQFP 100 | |
| ATmega16 | 16 | 0.5 | 1024 | 32 | 16 | 2.7-5.5 | 1 | 2 | 4 | Yes | 1 | 1 | Yes | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 20 | 3 | Yes | TQFP 44 | TQFP 44 MLF 44 PDIP 40 | |
| ATmega162 | 16 | 0.5 | 1024 | 35 | 16 | 1.8-5.5 | 2 | 2 | 6 | Yes | 1 | 2 | -- | Yes | -- | Yes | Yes | Yes | Yes | Yes | 28 | 3 | Yes | TQFP 44 | TQFP 44 MLF 44 PDIP 40 | |
| ATmega164P | 16 | 0.5 | 1024 | 32 | 20 | 1.8-5.5 | 1 | 2 | 6 | Yes | 1+USART | 2 | Yes | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 31 | 32 | Yes | TQFP 44 | TQFP 44 MLF 44 PDIP 40 | |
| ATmega164P Automotive | 16 | 0.5 | 1024 | 32 | 16 | 2.7-5.5 | 1 | 2 | 6 | Yes | 1+USART | 2 | Yes | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 31 | 32 | Yes | QFN 44 | QFN 44 TQFP 44 | |
| ATmega165 | 16 | 0.5 | 1024 | 54 | 16 | 1.8-5.5 | 1 | 2 | 4 | Yes | 1+USI | 1 | USI | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 23 | 17 | Yes | TQFP 64 | TQFP 64 MLF 64 | |
| ATmega165P | 16 | 0.5 | 1024 | 54 | 16 | 1.8-5.5 | 1 | 2 | 4 | Yes | 1+USI | 1 | USI | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 23 | 17 | Yes | TQFP 64 | TQFP 64 MLF 64 | |
| ATmega168 | 16 | 0.5 | 1024 | 23 | 20 | 1.8-5.5 | 1 | 2 | 6 | Yes | 1+USART | 1 | Yes | Yes | 8-Jun | Yes | Yes | Yes | Yes | Yes | 26 | 26 | Yes | TQFP 32 | TQFP 32 MLF 32 PDIP 28 | |
| ATmega168 Automotive | 16 | 0.5 | 1024 | 23 | 16 | 2.7-5.5 | 1 | 2 | 6 | Yes | 1+USART | 1 | Yes | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 26 | 26 | Yes | QFN 32 | QFN 32 TQFP 32 | |
| ATmega168P | 16 | 0.5 | 1024 | 23 | 20 | 1.8-5.5 | 1 | 2 | 6 | Yes | 1+USART | 1 | Yes | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 26 | 26 | Yes | TQFP 32 | TQFP 32 MLF 32 PDIP 28 | |
| ATmega169 | 16 | 0.5 | 1024 | 54 | 16 | 1.8-5.5 | 1 | 2 | 4 | Yes | 1+USI | 1 | USI | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 23 | 17 | Yes | TQFP 64 | TQFP 64 MLF 64 | |
| ATmega169P | 16 | 0.5 | 1024 | 54 | 16 | 1.8-5.5 | 1 | 2 | 4 | Yes | 1+USI | 1 | USI | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 23 | 17 | Yes | TQFP 64 | TQFP 64 MLF 64 | |
| ATmega2560 | 256 | 4 | 8192 | 86 | 16 | 1.8-5.5 | 4 | 2 | 16 | Yes | 1+USART | 4 | Yes | Yes | 16 | Yes | Yes | Yes | Yes | Yes | 57 | 32 | Yes | CBGA 100 CBGA 100 | TQFP 100 | |
| ATmega2561 | 256 | 4 | 8192 | 54 | 16 | 1.8-5.5 | 4 | 2 | 9 | Yes | 1+USART | 2 | Yes | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 48 | 17 | Yes | TQFP 64 | TQFP 64 MLF 64 | |
| ATmega256RZAV | 256 | 4 | 8192 | 54 | 16 | 1.8-5.5 | 4 | 2 | 9 | Yes | 1+USART | 2 | Yes | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 48 | 17 | Yes | TQFP 64 | TQFP 64 MLF 64 | |
| ATmega256RZBV | 256 | 4 | 8192 | 86 | 16 | 1.8-5.5 | 4 | 2 | 16 | Yes | 1+USART | 4 | Yes | Yes | 16 | Yes | Yes | Yes | Yes | Yes | 57 | 32 | Yes | TQFP 100 | TQFP 100 | |
| ATmega32 | 32 | 1 | 2048 | 32 | 16 | 2.7-5.5 | 1 | 2 | 4 | Yes | 1 | 1 | Yes | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 19 | 3 | Yes | TQFP 44 | TQFP 44 MLF 44 PDIP 40 | |
| ATmega324P | 32 | 1 | 2048 | 32 | 20 | 1.8-5.5 | 1 | 2 | 6 | Yes | 1+USART | 2 | Yes | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 31 | 32 | Yes | TQFP 44 | TQFP 44 MLF 44 PDIP 40 | |
| ATmega324P automotive | 32 | 1 | 2048 | 32 | 16 | 2.7-5.5 | 1 | 2 | 6 | Yes | 1+USART | 2 | Yes | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 31 | 32 | Yes | QFN 44 | QFN 44 TQFP 44 | |
| ATmega325 | 32 | 1 | 2048 | 54 | 16 | 1.8-5.5 | 1 | 2 | 4 | Yes | 1+USI | 1 | USI | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 23 | 17 | Yes | TQFP 64 | TQFP 64 MLF 64 | |
| ATmega3250 | 32 | 1 | 2048 | 69 | 16 | 1.8-5.5 | 1 | 2 | 4 | Yes | 1+USI | 1 | USI | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 32 | 17 | Yes | MLF 64 TQFP 64 | TQFP 64 TQFP 100 | |
| ATmega3250P | 32 | 1 | 2048 | 69 | 20 | 1.8-5.5 | 1 | 2 | 4 | Yes | 1+USI | 1 | USI | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 32 | 17 | Yes | TQFP 100 | TQFP 100 | |
| ATmega325P | 32 | 1 | 2048 | 54 | 20 | 1.8-5.5 | 1 | 2 | 4 | Yes | 1+USI | 1 | USI | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 23 | 17 | Yes | TQFP 64 | TQFP 64 MLF 64 | |
| ATmega328P | 32 | 1 | 2048 | 23 | 20 | 1.8-5.5 | 1 | 2 | 6 | Yes | 1+USART | 1 | Yes | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 26 | 26 | Yes | TQFP 32 | TQFP 32 MLF 32 PDIP 28 | |
| ATmega329 | 32 | 1 | 2048 | 54 | 16 | 1.8-5.5 | 1 | 2 | 4 | Yes | 1+USI | 1 | USI | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 25 | 17 | Yes | TQFP 64 | TQFP 64 TQFP 100 MLF 64 | |
| ATmega3290 | 32 | 1 | 2048 | 69 | 16 | 1.8-5.5 | 1 | 2 | 4 | Yes | 1+USI | 1 | USI | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 25 | 32 | Yes | MLF 64 TQFP 64 | TQFP 64 TQFP 100 | |
| ATmega3290P | 32 | 1 | 2048 | 69 | 20 | 1.8-5.5 | 1 | 2 | 4 | Yes | 1+USI | 1 | USI | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 25 | 32 | Yes | TQFP 100 | TQFP 100 | |
| ATmega329P | 32 | 1 | 2048 | 54 | 20 | 1.8-5.5 | 1 | 2 | 4 | Yes | 1+USI | 1 | USI | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 25 | 17 | Yes | TQFP 64 | TQFP 64 MLF 64 | |
| ATmega406 | 40 | 0.5 | 2048 | 18 | 1 | 25-Apr | 1 | 1 | 1 | Yes | -- | -- | Yes | Yes | -- | Yes | Yes | Yes | Yes | Yes | 23 | 4 | Yes | LQFP 48 LQFP 48 | ||
| ATmega48 | 4 | 0.25 | 512 | 23 | 20 | 1.8-5.5 | 1 | 2 | 6 | Yes | 1+USART | 1 | Yes | Yes | 8-Jun | Yes | Yes | Yes | Yes | Yes | 26 | 26 | Yes | TQFP 32 | TQFP 32 MLF 28 MLF 32 PDIP 28 | |
| ATmega48 Automotive | 4 | 0.25 | 512 | 23 | 16 | 2.7-5.5 | 1 | 2 | 6 | Yes | 1+USART | 1 | Yes | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 26 | 26 | Yes | QFN 32 | QFN 32 TQFP 32 | |
| ATmega48P | 4 | 0.25 | 512 | 23 | 20 | 1.8-5.5 | 1 | 2 | 6 | Yes | 1+USART | 1 | Yes | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 26 | 26 | Yes | TQFP 32 | TQFP 32 MLF 28 MLF 32 PDIP 28 | |
| ATmega64 | 64 | 2 | 4096 | 54 | 16 | 2.7-5.5 | 2 | 2 | 8 | Yes | 1 | 2 | Yes | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 34 | 8 | Yes | TQFP 64 | TQFP 64 MLF 64 | |
| ATmega640 | 64 | 4 | 8192 | 86 | 16 | 1.8-5.5 | 4 | 2 | 16 | Yes | 1+USART | 4 | Yes | Yes | 16 | Yes | Yes | Yes | Yes | Yes | 57 | 32 | Yes | CBGA 100 TQFP 100 CBGA 100 | ||
| ATmega644 | 64 | 2 | 4096 | 32 | 20 | 1.8-5.5 | 1 | 2 | 6 | Yes | 1+USART | 1 | Yes | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 31 | 32 | Yes | TQFP 44 | TQFP 44 MLF 44 PDIP 40 | |
| ATmega644P | 64 | 2 | 4096 | 32 | 20 | 1.8-5.5 | 1 | 2 | 6 | Yes | 1+USART | 2 | Yes | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 31 | 32 | Yes | TQFP 44 | TQFP 44 MLF 44 PDIP 40 | |
| ATmega644P Automotive | 64 | 2 | 4096 | 32 | 16 | 2.7-5.5 | 1 | 2 | 6 | Yes | 1+USART | 2 | Yes | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 31 | 32 | Yes | QFN 44 | QFN 44 TQFP 44 | |
| ATmega645 | 64 | 2 | 4096 | 54 | 16 | 1.8-5.5 | 1 | 2 | 4 | Yes | 1+USI | 1 | USI | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 23 | 17 | Yes | TQFP 64 | TQFP 64 MLF 64 | |
| ATmega6450 | 64 | 2 | 4096 | 69 | 16 | 1.8-5.5 | 1 | 2 | 4 | Yes | 1+USI | 1 | USI | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 32 | 17 | Yes | MLF 64 TQFP 64 | TQFP 64 TQFP 100 | |
| ATmega649 | 64 | 2 | 4096 | 54 | 16 | 1.8-5.5 | 1 | 2 | 4 | Yes | 1+USI | 1 | USI | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 25 | 17 | Yes | TQFP 64 | TQFP 64 TQFP 100 MLF 64 | |
| ATmega6490 | 64 | 2 | 4096 | 69 | 16 | 1.8-5.5 | 1 | 2 | 4 | Yes | 1+USI | 1 | USI | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 25 | 32 | Yes | MLF 64 TQFP 64 | TQFP 64 TQFP 100 | |
| ATmega64RZAPV | 64 | 2 | 4096 | 32 | 20 | 1.8-5.5 | 1 | 2 | 6 | Yes | 1+2 USART | 2 | Yes | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 31 | 32 | Yes | TQFP 44 | TQFP 44 MLF 44 PDIP 40 | |
| ATmega64RZAV | 64 | 2 | 4096 | 32 | 20 | 1.8-5.5 | 1 | 2 | 6 | Yes | 1+USART | 1 | Yes | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 31 | 32 | Yes | TQFP 44 | TQFP 44 MLF 44 PDIP 40 | |
| ATmega8 | 8 | 0.5 | 1024 | 23 | 16 | 2.7-5.5 | 1 | 2 | 3 | Yes | 1 | 1 | Yes | Yes | 8-Jun | Yes | Yes | Yes | Yes | Yes | 18 | 2 | Yes | TQFP 32 | TQFP 32 MLF 32 PDIP 28 | |
| ATmega8515 | 8 | 0.5 | 512 | 35 | 16 | 2.7-5.5 | 1 | 1 | 3 | -- | 1 | 1 | -- | Yes | -- | -- | Yes | Yes | Yes | Yes | 16 | 3 | Yes | PLCC 44 TQFP 44 | TQFP 44 MLF 44 PDIP 40 | |
| ATmega8535 | 8 | 0.5 | 512 | 32 | 16 | 2.7-5.5 | 1 | 2 | 4 | -- | 1 | 1 | Yes | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 20 | 3 | Yes | PLCC 44 TQFP 44 | TQFP 44 MLF 44 PDIP 40 | |
| ATmega88 | 8 | 0.5 | 1024 | 23 | 20 | 1.8-5.5 | 1 | 2 | 6 | Yes | 1+USART | 1 | Yes | Yes | 8-Jun | Yes | Yes | Yes | Yes | Yes | 26 | 26 | Yes | TQFP 32 | TQFP 32 MLF 32 PDIP 28 | |
| ATmega88 Automotive | 8 | 0.5 | 1024 | 23 | 16 | 2.7-5.5 | 1 | 2 | 6 | Yes | 1+USART | 1 | Yes | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 26 | 26 | Yes | QFN 32 | QFN 32 TQFP 32 | |
| ATmega88P | 8 | 0.5 | 1024 | 23 | 20 | 1.8-5.5 | 1 | 2 | 6 | Yes | 1+USART | 1 | Yes | Yes | 8 | Yes | Yes | Yes | Yes | Yes | 26 | 26 | Yes | TQFP 32 | TQFP 32 MLF 32 PDIP 28 | |
| ATtiny11 | 1 | -- | -- | 6 | 6 | 2.7-5.5 | -- | 1 | -- | -- | -- | -- | -- | -- | -- | Yes | -- | Yes | Yes | -- | 4 | 1 | -- | SOIC (208mil) 8 | SOIC (208mil) 8 PDIP 8 | |
| ATtiny12 | 1 | 0.0625 | -- | 6 | 8 | 1.8-5.5 | -- | 1 | -- | -- | -- | -- | -- | Yes | -- | Yes | Yes | Yes | Yes | -- | 5 | 1 | -- | SOIC (208mil) 8 | SOIC (208mil) 8 PDIP 8 | |
| ATtiny13 | 1 | 0.0625 | 64B + 32 reg | 6 | 20 | 1.8-5.5 | -- | 1 | 2 | -- | -- | -- | -- | Yes | 4 | Yes | Yes | Yes | Yes | No | 9 | 6 | Yes | SOIC (150mil) 8 | SOIC (150mil) 8 SOIC (208mil) 8 MLF 20 PDIP 8 | |
| ATtiny15L | 1 | 0.0625 | -- | 6 | 1.6 | 2.7-5.5 | -- | 2 | 1 | -- | -- | -- | -- | Yes | 4 | Yes | Yes | Yes | Yes | -- | 8 | 1(+5) | -- | SOIC (208mil) 8 PDIP 8 SOIC (208mil) 8 | ||
| ATtiny2313 | 2 | 0.125 | 128 | 18 | 20 | 1.8-5.5 | 1 | 1 | 4 | -- | USI | 1 | USI | Yes | -- | Yes | Yes | Yes | Yes | -- | 8 | 2 | Yes | SOIC (300mil) 20 | SOIC (300mil) 20 MLF 20 PDIP 20 | |
| ATtiny24 | 2 | 0.125 | 128 | 12 | 20 | 1.8-5.5 | 1 | 1 | 4 | -- | USI | -- | USI | Yes | 8 | Yes | Yes | Yes | Yes | -- | 17 | 12 | Yes | MLF 20 | MLF 20 PDIP 14 SOIC (150mil) 14 | |
| ATtiny24 Automotive | 2 | 0.125 | 128 | 12 | 16 | 2.7-5.5 | 1 | 1 | 4 | -- | USI | -- | USI | Yes | 8 | Yes | Yes | Yes | Yes | -- | 17 | 12 | Yes | rrow SOIC 14 | rrow SOIC 14 QFN 28 | |
| ATtiny25 | 2 | 0.125 | 128 | 6 | 20 | 1.8-5.5 | -- | 2 | 4 | -- | USI | -- | USI | Yes | 4 | Yes | Yes | Yes | Yes | -- | 15 | 7 | Yes | SOIC (208mil) 8 | SOIC (208mil) 8 MLF 20 PDIP 8 | |
| ATtiny25 Automotive | 2 | 0.125 | 128 | 6 | 16 | 2.7-5.5 | -- | 2 | 4 | -- | USI | -- | USI | Yes | 4 | Yes | Yes | Yes | Yes | -- | 15 | 7 | Yes | rrow SOIC 8 | rrow SOIC 8 | |
| ATtiny26 | 2 | 0.125 | 128 | 16 | 16 | 2.7-5.5 | -- | 2 | 2 | -- | USI | -- | USI | Yes | 11 | Yes | Yes | Yes | Yes | -- | 11 | 1 | -- | SOIC (300mil) 20 | SOIC (300mil) 20 MLF 32 PDIP 20 | |
| ATtiny261 | 2 | 0.125 | 128 | 16 | 20 | 1.8 - 5.5 | 1 | 2 | 2 | -- | Yes | -- | USI | Yes | 11 | Yes | Yes | Yes | Yes | -- | 19 | 2 | Yes | SOIC (300mil) 20 | SOIC (300mil) 20 PDIP 20 SOIC 20 | |
| ATtiny28L | 2 | -- | 32 | 11 | 4 | 1.8-5.5 | -- | 1 | -- | -- | -- | -- | -- | -- | -- | Yes | -- | Yes | Yes | -- | 5 | 2(+8) | -- | TQFP 32 MLF 32 PDIP 28 TQFP 32 | ||
| ATtiny44 | 4 | 0.25 | 256 | 12 | 20 | 1.8-5.5 | 1 | 1 | 4 | -- | USI | -- | USI | Yes | 8 | Yes | Yes | Yes | Yes | -- | 17 | 12 | Yes | MLF 20 | MLF 20 PDIP 14 SOIC (150mil) 14 | |
| ATtiny44 Automotive | 4 | 0.25 | 256 | 12 | 16 | 2.7-5.5 | 1 | 1 | 4 | -- | USI | -- | USI | Yes | 8 | Yes | Yes | Yes | Yes | -- | 17 | 12 | Yes | QFN 20 | QFN 20 rrow SOIC 14 | |
| ATtiny45 | 4 | 0.25 | 256 | 6 | 20 | 1.8-5.5 | -- | 2 | 4 | -- | USI | -- | USI | Yes | 4 | Yes | Yes | Yes | Yes | -- | 15 | 7 | Yes | SOIC (208mil) 8 | SOIC (208mil) 8 MLF 20 PDIP 8 | |
| ATtiny45 Automotive | 4 | 0.25 | 256 | 6 | 16 | 2.7-5.5 | -- | 2 | 4 | -- | USI | -- | USI | Yes | 4 | Yes | Yes | Yes | Yes | -- | 15 | 7 | Yes | rrow SOIC 8 | rrow SOIC 8 | |
| ATtiny461 | 4 | 0.25 | 256 | 16 | 20 | 1.8 - 5.5 | 1 | 2 | 2 | -- | Yes | -- | USI | Yes | 11 | Yes | Yes | Yes | Yes | -- | 19 | 2 | Yes | MLF 32 | MLF 32 PDIP 20 SOIC 20 | |
| ATtiny84 | 8 | 0.5 | 512 | 12 | 20 | 1.8-5.5 | 1 | 1 | 4 | -- | USI | -- | USI | Yes | 8 | Yes | Yes | Yes | Yes | -- | 17 | 12 | Yes | MLF 20 | MLF 20 PDIP 14 SOIC (150mil) 14 | |
| ATtiny84 Automotive | 8 | 0.5 | 512 | 12 | 16 | 2.7-5.5 | 1 | 1 | 4 | -- | USI | -- | USI | Yes | 8 | Yes | Yes | Yes | Yes | -- | 17 | 12 | Yes | QFN 20 | QFN 20 | |
| ATtiny85 | 8 | 0.5 | 512 | 6 | 20 | 1.8-5.5 | -- | 2 | 4 | -- | USI | -- | USI | Yes | 4 | Yes | Yes | Yes | Yes | -- | 15 | 7 | Yes | SOIC (208mil) 8 | SOIC (208mil) 8 MLF 20 PDIP 8 | |
| ATtiny85 Automotive | 8 | 0.5 | 512 | 6 | 16 | 2.7-5.5 | -- | 2 | 4 | -- | USI | -- | USI | Yes | 4 | Yes | Yes | Yes | Yes | -- | 15 | 7 | Yes | rrow SOIC 8 | rrow SOIC 8 | |
| ATtiny861 | 8 | 0.5 | 512 | 16 | 20 | 1.8 - 5.5 | 1 | 2 | 2 | -- | Yes | -- | USI | Yes | 11 | Yes | Yes | Yes | Yes | -- | 19 | 2 | Yes | MLF 32 | MLF 32 PDIP 20 SOIC 20 | |